Diamond Like Carbon (DLC)

Diamond-Like Carbon (DLC) coating is an amorphous nano-composite carbon material that exhibits properties similar to that of natural diamond including low friction, high hardness, and high corrosion resistance. The right coating can reduce sliding wear, and DLC coating machines can provide the right coating. When you add a DLC coating to your products, their hardness and resistance to corrosion are comparable to diamonds. DLC film has Pros of high hardness, corrosion resistance, anti-wear, low friction, etc. As such, it can be applied on tool coating, semi-conductor mold, optical lens, medical instrument. The DLC system from SYSKEY can precisely control the process gas alone with monitoring the parameters (Chamber pressure, Mass flow of special gases). Furthermore, SYSKEY’s DLC film has better adhesion and the property of high toughness, which can the hardness, electrical resistivity, and wear resistance requirements of unique product applications.



Applications Chamber
  • Wear coatings for medical & commercial products.
  • Encapsulation, isolation.
  • Scratch-resistant displays.
  • Flexible chamber sizes depend on substrate size and applications.
  • Chamber temperature control by using heater jacket, Cooling water, Hot water.


Configurations and benefits Options
  • Flexible substrate size.
  • Multi wafers Process.
  • Excellent thin-film uniformity of less than ±3%.
  • Mass flow controllers with highly uniform gas distribution.
  • Direct and remote capacitive coupled plasma (CCP).



We use cookies to ensure that we give you the best experience on our website. If you continue to use this site we will assume that you are happy with it.(Privacy policy)