Organic Material

Organic material thermal deposition system is a thermal evaporation system deposited organic materials onto substrate surface. This process requires high precision and uniformity of thin films by accurately controlling temperature and deposition rate.


To achieve the requirements, organic material thermal deposition system uses effusion cell as heating source with metal, quartz, ceramic or PBN crucible to contain organic material as well a PID controller to control deposition rate. This system is usually used in organic electronic research fields such as OPV, OLEDs, OPDs...  




 Organic light-emitting diode with high penetrati.  Using CCD alignment to control the 
  alignment of FMM and substrate, for
  the alignment accuracy ≦ ± 5um.

Encapsulation System

SYSKEY has launched a glass-to-glass encapsulation and pressing mechanism for laboratory grade. We integrate glue coating (UV glue, liquid gate) and UV lamps can be installed in the glove box or a separate encapsulation chamber, it can be put manually or through the automatic film transfer 

system.Flexible OLEDs must be thin and flexible, so the glass package is not suitable for this type. Thin-film encapsulation (TFE) or hybrid packaging technology must be used. SYSKEY initiates plasma-enhanced chemical vapor deposition, atomic layer deposition and Parylene coating system for TFE. We use low-temperature film-forming technology to layer multiple layers (SiNX, SiOXNX, Al2O3, ZnO, Parylene) on the OLEDs to get a better protection layer and reduce oxygen and water, thereby improving the life and performance of OLED panels.




                Atomic layer deposition system      Parylene coating system   Plasma-enhanced chemical
                                               vapor deposition

       WVTR for 5X10-4 g/m2/day

TEST RESULTS IN SELECTED UNITS           OLED lifetime for TFE, at the initial       The penetration of thin film encapsulation layer
Transmission Rate: -6.603313(<0.5) mg/[m2-day]           luminance of 10000 cd/m
Permeation: -3.119675 mg-mil//[m2-day]    
Date points        
Time Rate/Event Time Rate/Event Time Rate/Event Time Rate/Event  
0:00  Condition 8:00  Test 17:00   -12.75783 26:00   -7.118823  
35:00   -7.602876 44:00   -7.667113 53:00   -6.392888 62:00   -6.688553  
71:00   -6.879404 80:00   -6.768686 89:00   -6.603313 95:29   Complete  
95:29   Finished        



Applications Chamber
  • OLEDs.
  • Organic solar cell.
  • Materials research.


  • Constructed from 304 stainless steels, water cooled via external welding stainless steel 304.
  • Full-width opening door (HV chamber) integrated two viewports with shutters for observing substrate and evaporation sources.
  • Up to 12 evaporation sources can be installed in one chamber.
  • Ultimate vacuum of chamber about 10-8 Torr .
Configurations and benefits Options
  • Flexible substrate size up to 470 x 370 mm2 glass.
  • Excellent thin-film uniformity of less than ±3%.
  • Effusion cell (metal, ceramic, graphite, PBN crucible available) for Organic materials.
  • Auto deposition rate control: 0.01 Ǻ/sec.
  • Effusion cell evaporate control accuracy:±0.1℃.
  • Multiple sources with sequential operation or co-deposition.
  • Positioning of glass substrates and mask aligned to within ±5μm with a CCD camera.
  • Shutters are installed each evaporation source and substrate.
  • Intergrated with Load-Lock, robot arm, glove box.
  • Residual gas analyzerl.






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