The annealing furnace is a process method used in the fabrication of semiconductors. This process includes heating a plurality of semiconductor wafers to affect their electrical properties. The heat treatment aims to achieve different effects. The wafer can be heated to activate the dopants, density the deposited film, and change the state of the grown film.
Exposure to high temperatures can repair damage. This process is called annealing. Furnace annealing can be integrated into other furnace processing steps, such as oxidation, or can be processed separately.
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