In-Line Sputter

  • Vertical substrate feed
  • Substrate size: 470 x 370 mm2 (glass)
  • 10-7 Torr Ultimate vacuum
  • Thickness uniformity: <±3%
  • Full auto control with touch screen display
  • Heating system up to 400 C
  • Custom Design available
  • Fully Safety Interlocked
  • Full automatic control system with touch screen display
  • Real time record system data (pressure, substrate temperature, deposition rate)
  • Real time process control to provide precise film quality and film reliability
  • Multiple levels of access with password protection
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  • Semiconductors
  • Solar-cell
  • TCO (ITO, ZnO, AZO, GZO, IZO, IGZO etc)