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The Control system is easy-to-use graphical system and provides plenty of functionality for building customer applications. The vacuum system software provides authority manage, process control, data base link, auto service, remote monitor with "soft" valve interlocks. Also software includes chart and graph control for you to display the waveforms acquired from data acquisition device.

  Control platforms     Available options include
Manual control
PLC control
PC-Base control
  Authority manage
Automatic process control
Data logging and history search
Remote monitor
Multi-layer & co-deposition
Real time trend graphing
Safety interlocks and alerts
Authority manage Piping control Automatic Process control  
History data Power control