Organic material thermal deposition system is a thermal evaporation system deposited organic materials onto substrate surface. This process requires high precision and uniformity of thin films by accurately controlling temperature and deposition rate.

 

To achieve the requirements, organic material thermal deposition system uses effusion cell as heating source with metal, quartz, ceramic or PBN crucible to contain organic material as well a PID controller to control deposition rate. This system is usually used in organic electronic research fields such as OPV, OLEDs, OPDs...  

 

 

 

Organic light-emitting diode with high penetrati.	Using CCD alignment to control the
	alignment of FMM and substrate, for
	the alignment accuracy ≦ ± 5um.

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Encapsulation System

SYSKEY has launched a glass-to-glass encapsulation and pressing mechanism for laboratory grade. We integrate glue coating (UV glue, liquid gate) and UV lamps can be installed in the glove box or a separate encapsulation chamber, it can be put manually or through the automatic film transfer 

system.Flexible OLEDs must be thin and flexible, so the glass package is not suitable for this type. Thin-film encapsulation (TFE) or hybrid packaging technology must be used. SYSKEY initiates plasma-enhanced chemical vapor deposition, atomic layer deposition and Parylene coating system for TFE. We use low-temperature film-forming technology to layer multiple layers (SiN_X, SiO_XN_X, Al₂O₃, ZnO, Parylene) on the OLEDs to get a better protection layer and reduce oxygen and water, thereby improving the life and performance of OLED panels.

 

 

 

　　 　　　　　　　　　　　　　Atomic layer deposition system　　　　　　Parylene coating system　　　Plasma-enhanced chemical
　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　vapor deposition

WVTR for 5X10-4 g/m2/day
TEST RESULTS	IN SELECTED UNITS			OLED lifetime for TFE, at the initial 　　　　　　The penetration of thin film encapsulation layer
Transmission Rate:	-6.603313(<0.5)	mg/[m2-day]		luminance of 10000 cd/m2
Permeation:	-3.119675	mg-mil//[m2-day]
Date points
Time　Rate/Event	Time　Rate/Event	Time　Rate/Event	Time　Rate/Event
0:00　 Condition	8:00　 Test	17:00   -12.75783	26:00   -7.118823
35:00   -7.602876	44:00   -7.667113	53:00   -6.392888	62:00   -6.688553
71:00   -6.879404	80:00   -6.768686	89:00   -6.603313	95:29   Complete
95:29   Finished

 

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Applications	Chamber
OLEDs. Organic solar cell. Materials research.	Constructed from 304 stainless steels, water cooled via external welding stainless steel 304. Full-width opening door (HV chamber) integrated two viewports with shutters for observing substrate and evaporation sources. Up to 12 evaporation sources can be installed in one chamber. Ultimate vacuum of chamber about 10-8 Torr .
Configurations and benefits	Options
Flexible substrate size up to 470 x 370 mm2 glass. Excellent thin-film uniformity of less than ±3%. Effusion cell (metal, ceramic, graphite, PBN crucible available) for Organic materials. Auto deposition rate control: 0.01 Ǻ/sec. Effusion cell evaporate control accuracy：±0.1℃. Multiple sources with sequential operation or co-deposition. Positioning of glass substrates and mask aligned to within ±5μm with a CCD camera. Shutters are installed each evaporation source and substrate.	Intergrated with Load-Lock, robot arm, glove box. Residual gas analyzerl.